IEC 63068-3 Ed. 1.0 b:2020

Semiconductor devices - Non-destructive recognition criteria of defects in silicon carbide homoepitaxial wafer for power devices - Part 3: Test method for defects using photoluminescence

International Electrotechnical Commission, 07/13/2020

Publisher: IEC

File Format: PDF

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Description

Published:13/07/2020

Pages:51

File Size:1 file , 2.5 MB

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IEC 63068-3:2020 provides definitions and guidance in use of photoluminescence for detecting as-grown defects in commercially available 4H-SiC (Silicon Carbide) epitaxial wafers. Additionally, this document exemplifies photoluminescence images and emission spectra to enable the detection and categorization of the defects in SiC homoepitaxial wafers.