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  • IEST G-CC035.1

IEST G-CC035.1

Design Considerations for AMC Filtration Systems in Cleanrooms

Institute of Environmental Sciences and Technology, 07/01/2009

Publisher: IEST

File Format: PDF

$137.00$275.00


Published:01/07/2009

Pages:24

File Size:1 file , 600 KB

Note:This product is unavailable in Ukraine, Russia, Belarus

This Guideline provides information for designing filtration systems to eliminate trace amounts (less than 1 ppmv) of airborne molecular contamination (AMC) from the air supplied to cleanrooms and other controlled environments. The document covers applications, potential points of use, filtration methods, construction materials, performance comparison, and follow-up assessment. Also discussed are secondary impacts of the filters on the HVAC system and exterior impacts on the filtration system.

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